Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Mixing of two or more solid polymers; mixing of solid...
Reexamination Certificate
2006-08-15
2006-08-15
Moore, Margaret G. (Department: 1712)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Mixing of two or more solid polymers; mixing of solid...
C521S061000, C528S423000
Reexamination Certificate
active
07091287
ABSTRACT:
The present invention relates to a nanopore-forming material for forming an insulating film for a semiconductor device, and more particularly to a nanopore-forming organic material containing a triazine functional group and preparation thereof, and a composition for forming an insulating film for a semiconductor device comprising the same, an insulating film using the same, and a manufacturing process thereof.The pore-forming material of the present invention is easy to synthesize, and the molecular weight, molecular structure, and microenvironment thereof are easy to control, and thus it is suitable for a nanopore-forming material.
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Advanced Materials; Research News; “Templating Nanoporosity in Thin-Film Dielectric Insulators”; Authors: James L. Hedrick, Robert D. Miller, Craig J. Hawker, Kenneth R. Carter, Willi Volksen, Do Y. Yoon and Mikael Trollsas; pp. 1049-1053; 1998.
Choi Bum-Gyu
Kang Gwi-Gwon
Kang Jung-Won
Kim Young-Duk
Ko Min-Jin
Cantor & Colburn LLP
LG Chem Ltd.
Moore Margaret G.
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