Optical waveguides – Planar optical waveguide – Thin film optical waveguide
Patent
1997-02-28
1998-11-17
Palmer, Phan T. H.
Optical waveguides
Planar optical waveguide
Thin film optical waveguide
385130, 385132, 257347, G02B 610
Patent
active
058388702
ABSTRACT:
Nanometer scale silicon-on-insulator (SOI) guided-wave optical components in the near infra-red employ an SOI platform for optical isolation, and single mode silicon strip etched into the buried oxide. A multi-layer core for the strip consistes of several 1-3 nanometer crystal silicon multiple quantum wells confined by wide bandgap epitaxial barriers. The MQW region of the strip employs intersubband or band-to-band photonic effects. Active strip microcavities use a photonic bandgap resonator of etched air cylinders, or two sets of etched slot Bragg grating reflectors. Many thousands of these components can be integrated on a Si chip.
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patent: 5448513 (1995-09-01), Hulet et al.
patent: 5514885 (1996-05-01), Myrick
patent: 5559912 (1996-09-01), Agahi et al.
Nathans Robert L.
Palmer Phan T. H.
The United States of America as represented by the Secretary of
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