Nanometer distance regulation using electromechanical power diss

Details Nanometer distance regulation using electromechanical power diss Nanometer distance regulation using electromechanical power diss

1996-10-04

1999-03-23

Brown, Glenn W.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Distributive type parameters

324633, 324648, 324652, 324109, G01B 714, G01B10120, G01R 2702, G01R 2922

Patent

active

058865322

ABSTRACT:
A convenient, non-optical method for scanning probe microscopy tip-to-sample distance control based on the impedance change in a shear-force dither piezo. This is accomplished by determining the tip-sample distance by measuring the impedance change in a shear-force piezo-member. A Wheatstone type bridge can be utilized to regulate the tip-sample separation. Alternatively, an electrical bridge, having an output, regulates the tip-sample separation relative to the bridge output by driving the piezo/tip with a sine wave and combining said sine wave with a phase-referenced wave of equal amplitude at a 180.degree. phase shift. The electronic bridge detects impedance changes of about -100 dB across loads with impedance phases between -90.degree. to +90. Power dissipation is determined by measuring changes in electric impedance that a dither piezo presents to an oscillator. The non-optical method of determining probe-to-sample distance of an oscillating scanning probe consists of changing the probe-to-sample distance of an oscillating scanning probe. The changes in the electro-mechanical power dissipation of the oscillating probe are then measured.

REFERENCES:
patent: 5065103 (1991-11-01), Slinkman et al.
patent: 5319977 (1994-06-01), Quate et al.
patent: 5523700 (1996-06-01), Williams et al.

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