Nanomechanical oscillator

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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C310S330000, C310S331000, C333S187000, C333S195000

Reexamination Certificate

active

08063535

ABSTRACT:
A mechanical oscillator has components with dimensions in a sub-micron range to produce resonance mode oscillations in a gigahertz range. A major element is coupled to a minor, sub-micron element to produce large amplitude gigahertz frequency oscillation that is detected with readily available techniques. The mechanical structure can be formed according to a number of geometries including beams and rings and is excited with electrostatic, magnetic and thermal related forces, as well as other excitation techniques. The mechanical structure can be arranged in arrays for applications such as amplification and mixing and is less sensitive to shock and radiative environments than electrical or optical counterparts.

REFERENCES:
patent: 3634787 (1972-01-01), Newell
patent: 5640133 (1997-06-01), MacDonald et al.
patent: 5751200 (1998-05-01), Yamashita et al.
patent: 5914553 (1999-06-01), Adams et al.
patent: 6041600 (2000-03-01), Silverbrook
patent: 6124765 (2000-09-01), Chan et al.
patent: 6223601 (2001-05-01), Harada et al.
patent: 6249073 (2001-06-01), Nguyen et al.
patent: 6424074 (2002-07-01), Nguyen
patent: 6577040 (2003-06-01), Nguyen
patent: 6593831 (2003-07-01), Nguyen
patent: 6600252 (2003-07-01), Nguyen
patent: 6680660 (2004-01-01), Nguyen
patent: 6710680 (2004-03-01), Niu et al.
patent: 6713938 (2004-03-01), Nguyen
patent: 6737939 (2004-05-01), Hoppe et al.
patent: 6739190 (2004-05-01), Hsu et al.
patent: 6763340 (2004-07-01), Burns et al.
patent: 6831531 (2004-12-01), Giousouf et al.
patent: 6859113 (2005-02-01), Giousouf et al.
patent: 6861914 (2005-03-01), Photiadis et al.
patent: 6909221 (2005-06-01), Ayazi et al.
patent: 6917138 (2005-07-01), Nguyen
patent: 6930569 (2005-08-01), Hsu
patent: 6943484 (2005-09-01), Clark et al.
patent: 6947719 (2005-09-01), Buchaillot et al.
patent: 6954020 (2005-10-01), Ma et al.
patent: 6995622 (2006-02-01), Partridge et al.
patent: 7005946 (2006-02-01), Duwel et al.
patent: 7211926 (2007-05-01), Quevy et al.
patent: 7215061 (2007-05-01), Kihara et al.
patent: 7248128 (2007-07-01), Mattila et al.
patent: 7352608 (2008-04-01), Mohanty et al.
patent: 7492241 (2009-02-01), Piazza et al.
patent: 7504909 (2009-03-01), Tada
patent: 7724103 (2010-05-01), Feng et al.
patent: 7755454 (2010-07-01), Tanaka et al.
patent: 7791432 (2010-09-01), Piazza et al.
patent: 2002/0113191 (2002-08-01), Rolt et al.
patent: 2003/0117237 (2003-06-01), Niu et al.
patent: 2003/0186672 (2003-10-01), Buchaillot et al.
patent: 2004/0061564 (2004-04-01), Photiadis et al.
patent: 2004/0113722 (2004-06-01), Bircumshaw et al.
patent: 2004/0207492 (2004-10-01), Nguyen et al.
patent: 2005/0073078 (2005-04-01), Lutz et al.
patent: 2005/0158905 (2005-07-01), Kubena et al.
patent: 2006/0186971 (2006-08-01), Lutz et al.
patent: 2007/0247245 (2007-10-01), Hagelin
patent: 2008/0143217 (2008-06-01), Ho et al.
patent: 2008/0204153 (2008-08-01), Yoshida et al.
patent: 2008/0272852 (2008-11-01), Six
patent: 2009/0108381 (2009-04-01), Buchwalter et al.
patent: 2009/0108959 (2009-04-01), Piazza et al.
patent: 2009/0144963 (2009-06-01), Piazza et al.
patent: 2009/0294638 (2009-12-01), Mohanty et al.
patent: 2010/0007443 (2010-01-01), Mohanty et al.
patent: 2010/0134207 (2010-06-01), Mohanty et al.
patent: 2010/0155883 (2010-06-01), Wenzler et al.
patent: WO 98/01948 (1998-01-01), None
patent: WO 98/37635 (1998-08-01), None
patent: WO 2004/027796 (2004-04-01), None
patent: WO 2005/029700 (2005-03-01), None
patent: WO 2006/000611 (2006-01-01), None
patent: WO 2006/083482 (2006-08-01), None
patent: WO 2008/036845 (2008-03-01), None
patent: WO 2010/011288 (2010-01-01), None
Gaidarzhy, A., “Spectral response of a gigahertz-range nanomechanical oscillator,”App. Phys. Lett.86, 254103-1, 2005 American Inst. of Physics.
Humad et al., “High frequency micromechanical piezo-on-silicon block resonators,” Int'l Electron Devices Meeting 2003IEDM. Technical Digest, Washington, D.C. Dec. 8-10, 2003, New York, NY: IEEE US Dec. 8, 2003, pp. 957-960.
International Search Report and International Preliminary Report on Patentability for PCT/US2006/021298 mailed Nov. 6, 2006 and Dec. 6, 2007 respectively.
International Search Report and Written Opinion from PCT/US2007/079059 mailed Mar. 14, 2008.
International Search Report and Written Opinion from PCT/US2008/003793, mailed Jun. 16, 2008.
International Search Report and Written Opinion from PCT/US2007/079078, mailed Jul. 3, 2008.
Piazza et al., “Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromechanical resonators for UHF applications,” Micro Electro Mechanical Systems, 2005. MEMS 2005. 18thIEEE International Conference on Miami Beach, Florida, Jan. 30-Feb. 3, 2005, Piscataway, New Jersey, US, IEEE Jan. 30, 2005, pp. 20-23.
Shim et al., “Synchronized Oscillation in Coupled Nanomechanical Oscillators,”Science316:95-99, Apr. 6, 2007.
European Search Report from European Application No. 06733632.1, mailed May 6, 2009.
International Search Report, from PCT/US2006/000401, mailed Oct. 16, 2006.
Adams, S., et al., “Independent Tuning of Linear and Nonlinear Stiffness Coefficients”, Journal of Microelectromechanical Systems, vol. 7, No. 2, Jun. 1, 1998, pp. 172-180.
Lee, S., et al., “Mechanically-Coupled Micromechanical Resonator Arrays for Improved Phase Noise”, IEEE Frequency Control Symposium and Exposition, Proceedings 2004, Aug. 23, 2004, pp. 144-150.
Neuzil, P., et al., “Air flow actuation of micromechanical oscillators”, Applied Physics Letters, vol. 79, No. 1, Jul. 2, 2001, pp. 138-140.
Nguyen, C., “Vibrating RF MEMS for Next Generation Wireless Applications”, IEEE Custom Integrated Circuits Conference 2004, Oct. 3, 2004, pp. 257-264.

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