Optical: systems and elements – Diffraction – From grating
Reexamination Certificate
2008-03-04
2008-03-04
Allen, Stephone B. (Department: 2872)
Optical: systems and elements
Diffraction
From grating
C359S566000, C359S573000, C359S291000
Reexamination Certificate
active
07339738
ABSTRACT:
A nanomechanical near-field grating device is disclosed which includes two sub-gratings vertically spaced by a distance less than or equal to an operating wavelength. Each sub-grating includes a plurality of line-elements spaced apart by a distance less than or equal to the operating wavelength. A light source (e.g., a VCSEL or LED) can provide light at the operating wavelength for operation of the device. The device can operate as an active grating, with the intensity of a reflected or transmitted portion of the light varying as the relative positions of the sub-gratings are controlled by an actuator. The device can also operate as a passive grating, with the relative positions of the sub-gratings changing in response to an environmentally-induced force due to acceleration, impact, shock, vibration, gravity, etc. Since the device can be adapted to sense an acceleration that is directed laterally or vertically, a plurality of devices can be located on a common substrate to form a multi-axis acceleration sensor.
REFERENCES:
patent: 5351256 (1994-09-01), Schneider et al.
patent: 5428634 (1995-06-01), Bryan et al.
patent: 5493577 (1996-02-01), Choquette et al.
patent: 5557627 (1996-09-01), Schneider et al.
patent: 5568499 (1996-10-01), Lear et al.
patent: 5633527 (1997-05-01), Lear et al.
patent: 5903590 (1999-05-01), Hadley et al.
patent: 5978401 (1999-11-01), Morgan
patent: 6515751 (2003-02-01), Craighead et al.
patent: 6549010 (2003-04-01), Roozen et al.
patent: 6628851 (2003-09-01), Rumpf et al.
patent: 6894836 (2005-05-01), Christenson
patent: 7173764 (2007-02-01), Carr et al.
patent: 2003/0128361 (2003-07-01), Kurodà et al.
Solgaard, et al, Deformable Grating Optical Modular, Optics Letters, vol. 1, No. 9, May 1, 1992, E. L. Ginzton Lab, Stanford Univ, Stanford, CA 9305.
Chen, et al, A Thick Polysilicon Surface Micromachined Optically Sensed Acceleromter, Part of the SPIE Conf on Silicon-based Optoelectronics, San Jose, CA, Jan. 1999.
Carr, et al, Laterally Deformable Nanomechanical Zeroth-Order Gratings: Anamalous Diffraction Studied by Rigorous Coupled-Wave Analysis, Optics Letters, vol. 28, No. 18, Sep. 15, 2003.
Carr, et al, Measurement of a Laterally Deformable Optical NEMS Grating Transducer, Proceedings of SPIE vol. 5346 (SPIE, Bellingham, WA, 2004).
Keeler, et al, Experimental Demonstration of a Laterally Deformable Optical Nanoelec tromechanical System Grating Transducer, Optics Letters, vol. 29, No. 11, Jun. 1, 2004.
Thrush, et al, Integrated Semiconductor Vertical-Cavity Surface-Emitting Lasers and PIN Photodetectors for Biomedical Fluorescence Sensing, IEEE Journal of Quantum Electronics, vol. 40, No. 5, May 2004.
Keeler, Laterally Deformable Optical NEMS Grading Transducers for Inertial Sensing Applications, SPIE vol. 5592 (SPIE, Bellingham, WA, 2005).
Bogart Gregory Robert
Carr Dustin Wade
Keeler Bianca E. N.
Allen Stephone B.
Fineman Lee
Hohimer John P.
Sandia Corporation
LandOfFree
Nanomechanical near-field grating apparatus and acceleration... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Nanomechanical near-field grating apparatus and acceleration..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Nanomechanical near-field grating apparatus and acceleration... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2792644