Nanomachined and micromachined electrodes for...

Details Nanomachined and micromachined electrodes for... Nanomachined and micromachined electrodes for...

2006-01-17

2006-01-17

Bell, Bruce F. (Department: 1746)

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Treating substrate prior to coating

C205S215000, C205S221000, C205S223000, C205S233000, C205S291000, C205S324000, C205S326000

Reexamination Certificate

active

06986838

ABSTRACT:
A nanomachined and micromachined electrode (10) is disclosed that is produced by providing a layer of aluminum (11) positioned upon a conductive substrate (12), anodizing the layer of aluminum to produce a layer of aluminum oxide (13) having an array of pores (14), depositing a sacrificial metal (17) within the pores of the aluminum oxide layer, etching the aluminum oxide layer so as to leave an array of sacrificial metal rods (18), depositing a layer of electrode material (19) between the array of sacrificial metal rods, and etching the sacrificial metal rods so that a layer of copper remains having an array of pores (20) where the sacrificial metal rods had existed. The layer of copper is the electrode (10).

REFERENCES:
patent: 4970094 (1990-11-01), Byrd
patent: 6231744 (2001-05-01), Ying et al.

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