Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Reexamination Certificate
2008-03-12
2011-11-29
Ha, Nguyen T (Department: 2835)
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
C361S306100, C361S306300, C361S313000, C361S321200, C361S301400
Reexamination Certificate
active
08068328
ABSTRACT:
A method of manufacturing an embedded passive device for a microelectronic application comprises steps of providing a substrate (110, 210, 310), nanolithographically forming a first section (121, 221, 321) of the embedded passive device over the substrate, and nanolithographically forming subsequent sections (122, 222, 322) the embedded passive device adjacent to the first section. The resulting embedded passive device may contain features less than approximately 100 nm in size.
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Panat Rahul
Raravikar Nachiket R.
Ha Nguyen T
Intel Corporation
Nelson Kenneth A.
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