Nanoindentation surface analysis tool and method

Measuring and testing – Hardness – By penetrator or indentor

Reexamination Certificate

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Reexamination Certificate

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07451636

ABSTRACT:
The present invention provides a novel method for determining the mechanical properties of the surfaces of materials including thin films. Generally, the method is comprised of laterally scanning the surface of the film with an array of cantilever tips varying temperature, load and time to obtain a measurement of mechanical properties, such as hardness and glass transition temperature. The method can be used to obtain mechanical properties of films that would otherwise be unobtainable using standard methods.

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Baker (2000) Proceedings of the Materials Research Society Symposium Q 649:379.
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Oesterschulze (1998) Applied Physics A 66:S3.

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