Nanoimprint method and apparatus

Plastic and nonmetallic article shaping or treating: processes – Mechanical shaping or molding to form or reform shaped article – Deforming the surface only

Reexamination Certificate

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Details

C264S310000, C264S175000, C264S280000, C264S281000, C264S284000, C264S313000, C264S316000, C425S177000, C425S293000, C118S667000, C118S232000, C118S233000

Reexamination Certificate

active

08029717

ABSTRACT:
There is provided a nanoimprint apparatus. The nanoimprint apparatus transfers a pattern formed on a surface of a mold to a transfer layer which is formed partially or entirely on a side surface of a substantially cylindrical or columnar substrate. The nanoimprint apparatus includes: a first jig which is in contact with the substrate102; a second jig which rotatably supports the first jig; a press unit which is connected to the second jig to press the substrate on the mold104through the first and second jigs; and a movable holding unit which holds the mold and moves the mold104in a direction substantially perpendicular to a pressing force.

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International Search Report; PCT/JP2006/316144; Nov. 28, 2006.

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