Nanofabricated structures

Details Nanofabricated structures Nanofabricated structures

1993-06-24

1994-11-15

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

2504922, 369126, H01J 37305

Patent

active

053650735

ABSTRACT:
A method of forming a nano-scale device with a probe (2) such as a STM on a substrate (1) includes the step of rendering the relevant part of the substrate conductive while the device (5) is being formed with the probe so that current can flow from the probe to the substrate. Thereafter, to operate the device, the substrate is rendered non-conductive so as to prevent dissipation of current from the device through the substrate. The substrate can be altered in conductivity by cooling to undergo a Mott transition, can be heated from a normally non-conductive condition to become conductive, or subjected to laser radiation to induce charge carriers to render it conductive.

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patent: 4916688 (1990-04-01), Foster et al.
patent: 4987312 (1991-01-01), Eigler
patent: 5043578 (1991-08-01), Guethner et al.
patent: 5049461 (1991-09-01), Annett et al.
patent: 5252835 (1993-10-01), Lieber et al.
patent: 5304535 (1994-04-01), Harmer et al.

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