Nanochannel glass matrix used in making mesoscopic structures

Details Nanochannel glass matrix used in making mesoscopic structures Nanochannel glass matrix used in making mesoscopic structures

1992-06-12

1993-11-23

Hille, Rolf

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Electromagnetic or particle radiation

257461, 257 29, 65 31, 65 322, 65 42, 250207, H01L 2712, H01L 4500, C03C 1700, C03C 2700

Patent

active

052647226

ABSTRACT:
The present invention provides a method of forming a semiconductor device mprising the steps of:

REFERENCES:
patent: 3331670 (1967-07-01), Cole
patent: 4021216 (1977-05-01), Asam et al.
patent: 4101303 (1978-07-01), Balkwill
patent: 4246016 (1981-01-01), Siegmund
patent: 4606960 (1986-08-01), Angel et al.
patent: 4853020 (1989-08-01), Sink
patent: 4868622 (1989-09-01), Shigenaka
patent: 4912531 (1990-03-01), Reed et al.
patent: 5059001 (1991-10-01), Shimizu
patent: 5159231 (1992-10-01), Feller et al.

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