Nano-VCSEL device and fabrication thereof using nano-colonnades

Details Nano-VCSEL device and fabrication thereof using nano-colonnades Nano-VCSEL device and fabrication thereof using nano-colonnades

2008-07-15

2008-07-15

Harvey, Minsun (Department: 2828)

Coherent light generators

Particular active media

Semiconductor

C372S050120, C977S951000

Reexamination Certificate

active

11084886

ABSTRACT:
A nano-colonnade VCSEL device and a method of fabrication utilize a nanowire column grown nearly vertically from a (111) horizontal surface of a first layer to another horizontal surface of a second layer to connect the layers. The VCSEL device includes a first layer having the (111) horizontal surface; a second layer; and an insulator support between the first layer and the second layer that separates the first layer from the second layer. A portion of the second layer overhangs the insulator support, such that a horizontal surface of the overhanging portion is spaced from and faces the (111) horizontal surface of the first layer. The VCSEL device further includes a nanowire column extending nearly vertically from the (111) horizontal surface to the facing horizontal surface, and distributed Bragg mirrors adjacent to opposite end of the nanowire column.

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