Nano pattern writer

Details Nano pattern writer Nano pattern writer

2009-08-27

2011-11-22

Del Sole, Joseph (Department: 1743)

Plastic and nonmetallic article shaping or treating: processes

With step of making mold or mold shaping, per se

C264S040100, C264S400000, C427S248100, C427S405000, C425S385000, C425S177000, C977S887000

Reexamination Certificate

active

08062568

ABSTRACT:
A method for manufacturing a nano pattern writer includes forming one or more grooves on a first layer, depositing a substance on the first layer to form a film on the first layer, polishing the film on the first layer to thereby form a patterned film that fills the one or more grooves on the first layer, placing a second layer over the patterned film to thereby form a layered structure interposing the patterned film between the first layer and the second layer, and removing a part of the first layer and the second layer to thereby expose portions of the patterned film.

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Australian Patent Office, International Search Report and Written Opinion in related PCT application No. PCT/KR2010/005757 which is related to the present matter; mailed Nov. 16, 2010.

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