Nano-imprinted photonic crystal waveguide

Details Nano-imprinted photonic crystal waveguide Nano-imprinted photonic crystal waveguide

2007-10-02

2007-10-02

Healy, Brian M. (Department: 2883)

Optical waveguides

Planar optical waveguide

C385S014000, C385S130000, C385S131000, C369S013350, C369S013380, C369S112010, C369S112020, C438S029000, C438S031000, C065S385000, C065S386000, C065S402000, C065S404000, C264S001340, C264S001240

Reexamination Certificate

active

11072657

ABSTRACT:
This invention relates to a method for forming a nano-imprinted photonic crystal waveguide, comprising the steps of: preparing an optical film on a substrate; preparing a template having a plurality of protrusions of less than 500 nm in length such that the protrusions are spaced a predetermined distance from each other; heating the film; causing the template to press against the heated film such that a portion of the film is deformed by the protrusions; separating the template from the film; and etching the film to remove a residual layer of the film to form a nano-imprinted photonic crystal waveguide. Another embodiment of this invention fulfills these needs by providing a method for forming a nano-imprinted photonic crystal waveguide, comprising the steps of: a method for forming a nano-imprinted photonic crystal waveguide, comprising the steps of: preparing an optical film upon a substrate; preparing a template having a plurality of protrusions of less than 500 nm in length such that the protrusions are spaced a predetermined distance from each other; causing the template to modify a shape of the film; applying a UV light to the film and the template such that the film becomes polymerized; separating the template from the film; and etching the film to remove a residual layer of the film to form a nano-imprinted photonic crystal waveguide.

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