Nano-imprint system with mold deformation detector and...

Details Nano-imprint system with mold deformation detector and... Nano-imprint system with mold deformation detector and...

2007-12-04

2007-12-04

Gupta, Yogendra N. (Department: 1722)

Plastic and nonmetallic article shaping or treating: processes

With measuring, testing, or inspecting

C264S293000, C425S136000, C425S149000, C425S385000, C977S887000

Reexamination Certificate

active

10791926

ABSTRACT:
A system for nano-imprint with mold deformation detector is disclosed for real-time monitoring of the deformation of the mold. An electrostatic plate capacitor is embedded in the mold, serving as the deformation detector. The capacitor includes two opposite metal film electrodes formed by silicon micromachining technique on opposite surfaces of the mold and connected by a metal lead. During imprinting, the mold is acted upon by an external force and deformation occurs, which induces change of distance between the metal film electrodes and thus variation of the capacitance of the capacitor. The amount of deformation of the mold can then be assessed by comparing the capacitance with a reference. Thus, real-time detection and monitoring of the deformation of the nano-imprint mold is realized. Also disclosed is a method for carrying out the real-time monitoring of the deformation of the mold.

REFERENCES:
patent: 5472331 (1995-12-01), Watkins
patent: 5772905 (1998-06-01), Chou
patent: 6309580 (2001-10-01), Chou
patent: 6769897 (2004-08-01), Eppich et al.
patent: 2001/0022406 (2001-09-01), Woodmansee et al.
patent: 2002/0097059 (2002-07-01), Tartagni et al.
patent: 2003/0209817 (2003-11-01), Lee et al.
patent: 2004/0009252 (2004-01-01), Reichstein et al.
patent: 2004/0238821 (2004-12-01), Yang
patent: 2005/0003036 (2005-01-01), Nishimura et al.
patent: 2005/0084557 (2005-04-01), Fueller et al.

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