Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent
1986-04-08
1988-05-17
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
250557, G01N 2186, G01V 904
Patent
active
047452897
ABSTRACT:
A multi-wavelength optical apparatus for laser processing, alignment and observation employs dichroic mirrors, which, by virtue of their wavelength characteristics, affect a processing laser beam differently from alignment and observation light. A projection optical system and a dichroic mirror form first and second images of an aperture on an object disposed on a movable stage from processing light and alignment light, respectively. The position of the second image relative to a reference is determined and automatically provides the position of the first image relative to the reference. The apparatus is used to repair microdefects in semiconductor circuit elements, for example.
REFERENCES:
patent: 4278893 (1981-07-01), Kato et al.
patent: 4301363 (1981-11-01), Suzuki et al.
patent: 4337398 (1982-06-01), Ohnishi et al.
patent: 4395117 (1983-07-01), Suzuki
patent: 4595829 (1986-06-01), Neumann et al.
patent: 4603976 (1986-08-01), Fetzer et al.
Nelms David C.
Nippon Kogaku K. K.
Oen William L.
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