Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
2005-05-17
2005-05-17
Niebling, John F. (Department: 2812)
Semiconductor device manufacturing: process
With measuring or testing
Reexamination Certificate
active
06893882
ABSTRACT:
A multiple run by run process is described. A plurality of tools and a plurality of products to be run on the tools are provided. Tool effects and product effects on a parameter are identified for each tool and each product. A desired recipe is calculated for each product on each tool based on the tool effects and product effects identified. Thereafter, the plurality of products is run on the plurality of tools. The desired recipe is updated after each run of each tool. Tool aging is calculated after each run of each tool based on the desired recipe used.
REFERENCES:
patent: 5943550 (1999-08-01), Fulford, Jr. et al.
patent: 6148239 (2000-11-01), Funk et al.
patent: 6245581 (2001-06-01), Bonser et al.
patent: 6248602 (2001-06-01), Bode et al.
patent: 6303395 (2001-10-01), Nulman
patent: 6405144 (2002-06-01), Toprac et al.
Fung Ben
Huang Wei-Hsuang
Lin Hsiang-Min
Lo Yi-Chuan
Sun Cheng-I
Niebling John F.
Stevenson Andre′
Taiwan Semiconductor Manufacturing Co. Ltd.
LandOfFree
Multivariate RBR tool aging detector does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Multivariate RBR tool aging detector, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multivariate RBR tool aging detector will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3432392