Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-05-24
2005-05-24
Von Buhr, Maria N. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
Reexamination Certificate
active
06898471
ABSTRACT:
A multiple run by run process is described. A plurality of tools and a plurality of products to be run on the tools are provided. A desired recipe is calculated for each product on each tool based on a previous recipe used for each product on each tool and deviation of a parameter from a target value. Thereafter, the plurality of products is run on the plurality of tools. The desired recipe is updated after each run of each tool.
REFERENCES:
patent: 5243377 (1993-09-01), Umatate et al.
patent: 5757673 (1998-05-01), Osheiski et al.
patent: 5862054 (1999-01-01), Li
patent: 5943550 (1999-08-01), Fulford et al.
patent: 5963902 (1999-10-01), Wang
patent: 6148239 (2000-11-01), Funk et al.
patent: 6238936 (2001-05-01), Yu
patent: 6245581 (2001-06-01), Bonser et al.
patent: 6248602 (2001-06-01), Bode et al.
patent: 6263255 (2001-07-01), Tan et al.
patent: 6303395 (2001-10-01), Nulman
patent: 6405144 (2002-06-01), Toprac et al.
patent: 6701206 (2004-03-01), Markle et al.
patent: 6735493 (2004-05-01), Chou et al.
patent: 6738682 (2004-05-01), Pasadyn
U.S. Appl. No. 10/313,501, filed Dec. 6, 2002, TSMC-01-1509, assigned to the same assignees, “Multivariate RBR Tool Aging Detector”.
Fun Yu Pen
Huang Wei-Hsuang
Lin Hsiang-Ming
Lo Yi-Chuan
Sun Cheng-I
Taiwan Semiconductor Manufacturing Company
Thomas Kayden Horstemeyer & Risley
Von Buhr Maria N.
LandOfFree
Multivariate RBR tool aging adjuster does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Multivariate RBR tool aging adjuster, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multivariate RBR tool aging adjuster will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3367903