Multistep laser ablation method for making optical waveguide ref

Details Multistep laser ablation method for making optical waveguide ref Multistep laser ablation method for making optical waveguide ref

1991-11-04

1994-11-29

Padgett, Marianne

Coating processes

Direct application of electrical, magnetic, wave, or...

Pretreatment of substrate or post-treatment of coated substrate

427164, 4271632, 156643, 21912169, B05D 306, B05D 506, B23K 2602

Patent

active

053689003

ABSTRACT:
An optical reflector for a polymeric waveguide mounted on a generally planar substrate is formed by a method that includes sequentially irradiating overlapping zones of a polymeric ridge using a series of intermittent laser beam flashes directed normal to the substrate. Each flash is selected to be effective to remove a layer of the ridge to a predetermined depth. Each zone has a linear leading edge and is displaced relative to the leading edge of the immediately preceding zone by a distance corresponding to the predetermined depth. Furthermore, each succeeding zone overlaps the leading edge of the preceding zone. It is surprisingly found that flashes cooperate at the leading edges to form a smooth, oblique surface that, when coated with a reflective metal film, is suited for reflecting a light signal between a path normal to the substrate and a waveguide path parallel to the substrate.

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Trewhella, et al., "Total Internal Reflection Mirrors Fabricated in Polymeric Optical Waveguides via Excimer Laser Ablation", SPIE vol. 1377 Excimer Laser Materials Processing and Beam Delivery Systems (1990), pp. 64-72 No Month.
Lalk, et al., "Processing Techniques for Polymer Optical Waveguides", presented at Antech Workshop in 1991 No Month.
Kokubun, et al., "Silicon Optical Printed Circuit Board for Three-Dimensional Integrated Optics", Electronics Letters, vol. 21, No. 11 (May 1985).

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