Multistage positive-displacement vacuum pump

Details Multistage positive-displacement vacuum pump Multistage positive-displacement vacuum pump

1997-09-02

1998-10-06

Vrablik, John J.

Pumps

Motor driven

Electric or magnetic motor

417420, 418 9, F04B 3504, F04C 2502

Patent

active

058167820

ABSTRACT:
A multistage positive-displacement vacuum pump which is preferably used in the fabrication of semiconductor devices and can be operated from atmospheric pressure. The vacuum pump comprises a pump casing, a pump assembly housed in the pump casing and comprising a pair of pump rotors rotatable in synchronism with each other and arranged in multiple stages, and an intermediate pressure chamber provided between a preceding stage and a subsequent stage in the pump casing. The shaft portions of the pump rotors located between the preceding and subsequent stages are located in the intermediate pressure chamber.

REFERENCES:
patent: 1531607 (1925-03-01), Green
patent: 3545888 (1970-12-01), Wycliffe et al.
patent: 3677664 (1972-07-01), Wycliffe et al.
European Patent Office Communication including European Seach Report, Annex to the European Search Report and translated Abstract for European Patent Application NO. 96105951.6; dated Aug. 26, 1996.

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