Multispectral light detection system

Details Multispectral light detection system Multispectral light detection system

1979-08-06

1982-03-16

Hix, L. T.

Photocopying

Including fiber optics

355 68, 356222, G03B 2772

Patent

active

043198309

ABSTRACT:
A multispectrum light detection system for controlling exposure time of a photoresist coated substrate in a projection aligner-printer machine wherein the relatively narrow spectral responsivity characteristics of a selected photoresist is matched to the wider spectrum inherent in the output flux of a combined light source and optical system. A representative sample of the system's wide spectrum output flux is divided into three or more narrower spectral bands each of which is measured by its own detector that provides an electrical signal proportional to the radiant flux intensity within that band. The resultant electrical signals from the separate spectral bands are weighted and combined in a summing amplifier to form a composite exposure control signal. Means are provided to adjust the contribution of each electrical signal to the combined control signal in accordance with known spectral response characteristics of the photoresist.

REFERENCES:
patent: 3649118 (1972-03-01), Yano et al.
patent: 3778154 (1973-12-01), Denharadt et al.
patent: 3819275 (1974-06-01), Aimi et al.

Affiliated with

Also associated with

Rating

Multispectral light detection system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multispectral light detection system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multispectral light detection system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1639713