Multipurpose slurry delivery arm for chemical mechanical...

Details Multipurpose slurry delivery arm for chemical mechanical... Multipurpose slurry delivery arm for chemical mechanical...

2006-05-30

2006-05-30

Ackun, Jr., Jacob K. (Department: 3723)

Abrading

Abrading process

Abradant supplying

Reexamination Certificate

active

07052374

ABSTRACT:
An adjustable slurry dispensing device for use with a chemical mechanical polishing apparatus is disclosed. The slurry arm is pivotally connected to the polishing apparatus and has a slurry delivery assembly that is translatable along the length of the arm. This combination of adjustments allows the user to deposit polishing slurry at a desired location on the polishing pad of the polishing apparatus. The dispensing device may be motorized, in which case the slurry arm may be automatically pivotable and the slurry delivery assembly may be automatically translatable along the slurry arm. The motors may be controlled by a computer, or they may be manually adjusted by the user. A method of using the apparatus is also disclosed.

REFERENCES:
patent: 5804507 (1998-09-01), Perlov et al.
patent: 6280299 (2001-08-01), Kennedy et al.
patent: 6348124 (2002-02-01), Garbett et al.
patent: 6398627 (2002-06-01), Chiou et al.
patent: 6410441 (2002-06-01), Niu
patent: 6482290 (2002-11-01), Cheng et al.
patent: 2004/0198184 (2004-10-01), Joslyn
patent: 2004/0219867 (2004-11-01), Gotkis et al.
patent: 2005/0026549 (2005-02-01), Maury et al.
patent: 2005/0124267 (2005-06-01), Jiang et al.

Affiliated with

Also associated with

Rating

Multipurpose slurry delivery arm for chemical mechanical... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multipurpose slurry delivery arm for chemical mechanical..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multipurpose slurry delivery arm for chemical mechanical... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3651855