Multiprobe test system and method of using same

Details Multiprobe test system and method of using same Multiprobe test system and method of using same

1978-04-04

1980-03-25

Rolinec, Rudolph V.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 725, 324158F, G01R 106, G01R 3102

Patent

active

041952596

ABSTRACT:
A multiprobe test system is disclosed for testing microcircuits which includes a printed circuit board having a plurality of data-detector probes attached for z-axis control and edge detection. The data-detector probes include a support body, and an arm supported by the body and attached thereto in an angular fashion. A probe tip in the form of a needle extends from and is attached to the arm. The probe tip includes a downwardly positioned point for contact with the surface having integrated circuits defined thereon. A force sensitive material is attached to but electrically isolated from the arm and has conductor leads extending therefrom. The force sensitive material comprises a piezoelectric material, for example. A detector circuit having a plurality of channels receives signals delivered by the force sensitive material of each data-detector probe enabling the monitoring of planarization of the data-detector probe tips as well as controlling the overtravel of the probe tip into the surface having integrated circuits defined thereon. A method of using the multiprobe test system having a probe card with a plurality of data-detector probes located thereon is also disclosed.

REFERENCES:
patent: 3093710 (1963-06-01), Eyck
patent: 3810017 (1974-05-01), Wiesler et al.
patent: 3849728 (1974-11-01), Evans
Byrnes et al., "Self-Measurement of Probe Deflection"; IBM Tech. Disc. Bull.; Jun. 1977; pp. 166-167.

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