Multiprobe head for checking electrical parameters of semiconduc

Details Multiprobe head for checking electrical parameters of semiconduc Multiprobe head for checking electrical parameters of semiconduc

1975-03-17

1977-07-12

Rolinec, Rudolph V.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 725, G01R 106, G01R 3102

Patent

active

040357228

ABSTRACT:
The proposed multiprobe head comprises a probe holder which is a monolithic glass block having longitudinal capillary channels, said member being secured in a casing with its butt end facing contact elements of a semiconductor instrument or microcircuit being checked. Said capillary channels receive probes which are adapted for axial movement.

REFERENCES:
patent: 3731191 (1973-05-01), Bullard et al.
"Probe Pressure and Tip Radius," Solid State Technology, June 1969, pp. 6, 69, 70.
Beauregard et al., "High-Speed Multiprobe," IBM Tech. Dis. Bull., vol. 8, No. 8, Jan. 1966, p. 1144.

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