Multiprobe contact monitor and control system

Details Multiprobe contact monitor and control system Multiprobe contact monitor and control system

1978-06-26

1980-05-06

Rolinec, Rudolph V.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 725, 324148F, G01R 3102, G01R 106

Patent

active

042019397

ABSTRACT:
A planarization and overtravel control circuit is disclosed utilized in conjunction with a multiprobe test system for testing microcircuits disposed on a semiconductor wafer surface. The planarization and overtravel control circuit enables the monitoring of the planarization limit required between data detector probe tips making contact with the integrated circuits on the semiconductor wafer. Overtravel, the distance the data detector probe tips travel into the semiconductor wafer, is also monitored by this apparatus.

REFERENCES:
patent: 3446065 (1969-05-01), Wiesler et al.

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