Multiprobe apparatus

Details Multiprobe apparatus Multiprobe apparatus

1992-01-28

1994-03-08

Nguyen, Vinh

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158F, G01R 104

Patent

active

052935167

ABSTRACT:
A multiprobe apparatus for probing a device having a plurality of contacts includes a holder for holding the device in a fixed position; a plurality of electrically conducting elongated probes, each probe being adapted for electrical communication with a respective one of the contacts by tangential linear contact along the length of the probe; and a probe support for supporting the probes and for maintaining the probes in electrical communication with the contacts.

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Paper on "Thin Film Hybrid Technology for On-Wafer Probing of Integrated Circuits" from Hybrid Circuit Technology dated Apr. 14, 1990.
Paper on "Design and Fabrication of a Monolithic High-Density Probe Card for High-Frequency On-Wafer Testing" by Soonil Hong, et al. presented at the International Electron Devices Meeting, Washington, D.C. Dec. 3-6, 1989 (sponsored by Electron Devices Society of IEEE).

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