Multiport cryopump

Details Multiport cryopump Multiport cryopump

1983-02-14

1984-05-08

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62100, 62268, 417901, B01D 800

Patent

active

044467028

ABSTRACT:
A cryopump installation in which a novel cryopump 20 maintains a work chamber 12 at continuous high vacuum while periodically evacuating a load lock 14 in order to allow transfer of material from the load lock 14 to the work chamber 12 without disruption of the work chamber environment. The cryopump has pumping ports 46 positioned on the radiation shield 50 in order to pump plenum 72 to a high vacuum. Load lock gases enter the cryopump through port 46 and are condensed and adsorbed by the radiation shield 50 and second stage cryopanel 54.

REFERENCES:
patent: 4148196 (1979-04-01), French et al.
patent: 4339927 (1982-07-01), Sarcia
Schematic of a Multiport Cryopump, Author unknown, Helix Technology Corporation Files, Circa 1979.
Detailed drawing of the Multiport Cryopump of Reference AR, Author unknown, Helix Technology Corporation Files, Circa 1979.

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