Multipoint nanoprobe

Details Multipoint nanoprobe Multipoint nanoprobe

2005-12-13

2005-12-13

Lefkowitz, Edward (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S696000, C600S011000

Reexamination Certificate

active

06975124

ABSTRACT:
A nanoprobe includes a substrate having a layer, which forms a projected portion. A plurality of conductive lines is adhered to the projected portion and the lines extend beyond an end of the projected portion by a distance to form contact points, wherein the lines are connected to material of the projected portion to provide stiffness and the contact points provide flexibility during use.

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Kakushima et al. (Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on Jan. 21-25, 2001), pp:294-297.

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