Multiple wavelength polarization-modulated ellipsometer with pha

Details Multiple wavelength polarization-modulated ellipsometer with pha Multiple wavelength polarization-modulated ellipsometer with pha

1994-09-23

1996-08-20

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With polariscopes

356369, G01J 400

Patent

active

055484042

ABSTRACT:
A method and apparatus for analyzing a sample wherein at least two orthogonally polarized, intensity and phase modulated laser beams with different wavelengths and frequencies of intensity and phase modulation are directed onto the sample, and the signals derived from the laser beams which interact with the sample are synchronously demodulated to determine characteristics of the sample such as index of refraction, absorption coefficient and film thickness. A reference beam can be provided to correct for noise and drift.

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