Multiple wafer holder for a wafer transfer system

Details Multiple wafer holder for a wafer transfer system Multiple wafer holder for a wafer transfer system

1983-09-22

1986-07-29

Moy, Joseph Man-Fu

Special receptacle or package

For a building component

Shingle

206454, B65D 8548

Patent

active

046027130

ABSTRACT:
A multiple wafer holder generally of the size and shape of a standard wafer has on its front surface a plurality of pockets. The edge of each pocket is generally V-shaped and grooved so that wafers of different sizes can be carried by each holder and more than one wafer can be transported together into the processing chamber of an implanter from a cassette.

REFERENCES:
patent: 3850296 (1974-11-01), Hirata et al.
patent: 4311427 (1982-01-01), Coad et al.
patent: 4450960 (1984-05-01), Johnson
patent: 4471716 (1984-09-01), Milliren
patent: 4490087 (1984-12-01), Ryan et al.
patent: 4493418 (1985-01-01), Johnson
Instruction Manual Production Ion Implanter Model 200-20A1, Varian Extrion Division, Apr. 1976, Section 1.4.8(a).

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