Multiple target laser ablation system

Details Multiple target laser ablation system Multiple target laser ablation system

1993-12-01

1996-01-09

Paschall, Mark H.

Electric heating

Metal heating

By arc

21912172, 21912185, 21912165, 21912161, 427509, 427554, 118 501, B23K 2600, B23K 2612

Patent

active

054830370

ABSTRACT:
A laser ablation apparatus and method are provided in which multiple targets consisting of material to be ablated are mounted on a movable support. The material transfer rate is determined for each target material, and these rates are stored in a controller. A position detector determines which target material is in a position to be ablated, and then the controller controls the beam trigger timing and energy level to achieve a desired proportion of each constituent material in the resulting film.

REFERENCES:
patent: 4987007 (1991-01-01), Wagal et al.
patent: 5206216 (1993-04-01), Yoshida
patent: 5212148 (1993-05-01), Roas et al.
patent: 5227363 (1993-07-01), Furukawa et al.
patent: 5324552 (1994-06-01), Opower et al.
patent: 5334252 (1994-08-01), Yoshida et al.
patent: 5334815 (1994-08-01), MacNaughton et al.

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