Multiple switch MEMS structure and method of manufacture

Wave transmission lines and networks – Plural channel systems – Having branched circuits

Reexamination Certificate

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C333S105000, C333S262000

Reexamination Certificate

active

11221745

ABSTRACT:
A multiple switch MEMS structure has a higher resistance, higher durability switch arranged in parallel with a lower resistance, less durable switch. By closing the higher resistance, high durability switch before the lower resistance, less durable switch, the lower resistance, less durable switch is protected from voltage transients and arcing which may otherwise damage the lower resistance, less durable switch. By appropriate selection of dimensions and materials, the high resistance, high durability switch may be assured to close first, as well as open first, thereby also protecting the lower resistance, less durable switch from voltage transients upon opening as well as upon closing.

REFERENCES:
patent: 5943223 (1999-08-01), Pond
patent: 2007/0096860 (2007-05-01), Foster et al.

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