Multiple-substance alloy for targets of cathode sputtering appar

Details Multiple-substance alloy for targets of cathode sputtering appar Multiple-substance alloy for targets of cathode sputtering appar

1986-10-20

1989-02-28

Rutledge, L. Dewayne

Alloys or metallic compositions

Gold base

420508, 420512, C22C 502

Patent

active

048083739

ABSTRACT:
A multiple-substance alloy used as a target in a cathode sputtering apparatus, and having a gold content most preferably in the range of 94-98 percent by weight, is disclosed. The alloy further contains non-gold alloys of aluminum, copper and preferably an element of the group of Co, Ni, Ga, Ti, In, Cd, Sn, Fe and Pd.

REFERENCES:
patent: 1557431 (1925-10-01), Davignon
patent: 3769006 (1973-10-01), Ingersoll
patent: 4466940 (1984-08-01), Siewert et al.

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