Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1993-04-12
1994-11-08
Williams, Hezron E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
G01P 1513
Patent
active
053616359
ABSTRACT:
A servo accelerometer permits compliant suspension with a pair of flexures by using a plurality of tunnel current position sensors each respectively associated with a corresponding pair of electrostatic drive electrodes. The tunnel current position sensors and the electrostatic drive electrodes are positioned to control undesired movement of the proof mass about a first axis which is normal to the input axis of the accelerometer. In another embodiment, three tunnel current sensors and three pairs of drive electrodes are used to control movement of the proof mass about the first axis and a second axis.
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Allied-Signal Inc.
Massung Howard G.
Oda Christine K.
Williams Hezron E.
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