Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Patent
1997-11-26
2000-03-21
Teska, Kevin J.
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
39550028, 39550023, 700 29, 700 32, G06F 9455
Patent
active
060411724
ABSTRACT:
A method for processing signals and controlling a physical system in which measurements are obtained at different time scales and/or different space scales. Signals generated from the physical system are processed by first creating a first dynamic model at a first time/space scale that consists of a first set of parameters, a first set of states and a first set of inputs. A second dynamic model at a second time/space scale is also created and consists of a second set of parameters, a second set of states and a second set of inputs. At least one of the first set of parameters in the first dynamic model are computed from the second set of states in the second dynamic model. A second estimator is then created to produce estimates of the second set of states using the second dynamic model, measurements from the first physical system at the second time scale. A first estimator is also created to produce estimates of the first set of states using the first dynamic model, measurements from the first physical system at the first time scale, and the estimates from the second estimator.
REFERENCES:
patent: 4577270 (1986-03-01), Sugano et al.
patent: 4852018 (1989-07-01), Grossberg et al.
patent: 4881178 (1989-11-01), Holland et al.
patent: 4974191 (1990-11-01), Amirghodsi et al.
patent: 5040214 (1991-08-01), Grossberg et al.
patent: 5060132 (1991-10-01), Beller et al.
patent: 5191521 (1993-03-01), Brosilow
patent: 5214715 (1993-05-01), Carpenter et al.
patent: 5355305 (1994-10-01), Seem et al.
patent: 5377307 (1994-12-01), Hoskins et al.
patent: 5412060 (1995-05-01), Wulff et al.
patent: 5453226 (1995-09-01), Kline et al.
patent: 5464369 (1995-11-01), Federspiel
patent: 5506794 (1996-04-01), Lange
patent: 5517594 (1996-05-01), Shah et al.
patent: 5740033 (1998-04-01), Wassick et al.
patent: 5748847 (1998-05-01), Lo
patent: 5805447 (1998-09-01), Teng et al.
PCT International Search Report for PCT/US98/17439 mailed Dec. 29, 1998.
PCT International Search Report for PCT/US98/23889 mailed Apr. 1, 1999.
Rob A. Rutenbar, "Simulated Annealing Algorithms: An Overview", IEEE Circuits and Devices Magazine vol. 5, No. 1, Jan. 1989, pp. 19-26.
N. U. Ahmed et al., "Modified Extended Kalman Filtering" IEEE Transactions on Automatic Control, vol. 39, No. 6, Jun. 1994, pp. 1322-1326.
Brian, D. O. Anderson et al., "Optimal Filtering" Prentice-Hall Information and System Sciences Series, 1997, pp. 1-61, 148, 149, 192-197.
Mozumder, et al, "A Monitor Wafer Based Controller for Semiconductor Processes," IEEE Transactions on Semiconductor Manufacturing, pp. 400-411, Aug. 1994.
Gyugyi et al, "Model-Based Control of Rapid Thermal Processing Systems," First IEEE Conference of Control Applications, pp. 374-381, 1992.
Boning, "Run by Run Control Benchmarking: A White Paper," http://www-mtl.mit.edu/rbrBench/white-paper.html (Oct. 1996).
Erickson Mark A.
Pandey Pradeep
Shah Sunil C.
Broda Samuel
Teska Kevin J.
Voyan Technology
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