Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate
2005-06-07
2005-06-07
Hassanzadeh, Parviz (Department: 1763)
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
C118S7230EB, C118S727000, C427S596000, C427S566000
Reexamination Certificate
active
06902625
ABSTRACT:
An improved crucible cover for multiple pocket electron beam sources has been invented. The invention provides selection between one of the multiple pockets for evaporative heating and a noncontacting, line-of-sight blocking baffle between heated and unheated pockets. In one embodiment, the baffle is formed by the cooperation of a crucible surface groove with a cover feature that extends into the groove. In a second embodiment, the baffle is formed by a barrier extending upwards from the crucible surface between pockets that cooperates with a cover to form the line-of-sight baffle. The crucible and cover in these embodiments accommodate deposits without hindering the ability of the baffle to reduce contamination or interfere with the operation of the source. Additionally, the cover and crucible may be operated separately, with a cover lifting mechanism that lowers the cover to form a baffle and raises the cover to allow the separately controlled rotation of the crucible. By blocking the line-of-sight between pockets and providing a way to reduce contamination from deposits, the present invention eliminates the main sources of material contamination in multiple pocket sources.
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Hey David A.
The BOC Group Inc.
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