Multiple-nozzle thermal evaporation source

Details Multiple-nozzle thermal evaporation source Multiple-nozzle thermal evaporation source

2006-01-03

2006-01-03

Bueker, Richard (Department: 1763)

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

C392S388000, C392S389000

Reexamination Certificate

active

06982005

ABSTRACT:
A multiple nozzle thermal evaporation source includes a plurality of nozzles having a tapered shape. The nozzles may comprise a thermally conductive material having a low emissivity material.

REFERENCES:
patent: 4146774 (1979-03-01), Fraas
patent: 4325986 (1982-04-01), Baron et al.
patent: 4392451 (1983-07-01), Mickelsen et al.
patent: 5532102 (1996-07-01), Soden et al.
patent: 6202591 (2001-03-01), Witzman et al.

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