Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate
2007-07-03
2010-11-16
Cleveland, Michael (Department: 1712)
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
Reexamination Certificate
active
07833354
ABSTRACT:
Disclosed is a multiple nozzle evaporator in which a material to be evaporated in the evaporator can be deposited on a substrate with an improved efficiency of use of the material, thereby forming a large-area uniform thin film. The evaporator includes a cylindrical or rectangular post-shaped crucible31or51with an open top face; and a nozzle unit32having a body portion having a cylindrical or rectangular post-like shape with a height smaller than that of the crucible31or51and assembled to an upper portion of the crucible, and a plurality of evaporation tubes formed at an angle while penetrating through the body portion between top and bottom faces of the body portion. An evaporated material spouts toward peripheral areas of a substrate due to the inclined evaporation tubes, thereby improving the uniformity of a thin film to be deposited and the efficiency of use of the evaporated material, and preventing condensation of the evaporated material at a spouting portion.
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U.S. Appl. No. 11/869,289 to Kim et al., which was filed on Oct. 9, 2007.
Choi Myung-Woon
Jeong Kwang-Ho
Kim Seong-Moon
Park Hyung-Won
Chen Keath T
Cleveland Michael
Greenblum & Bernstein P.L.C.
Yas Co., Ltd.
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