Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate
2011-07-12
2011-07-12
Chen, Keath T (Department: 1712)
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
Reexamination Certificate
active
07976636
ABSTRACT:
Disclosed is a multiple nozzle evaporator in which a material to be evaporated in the evaporator can be deposited on a substrate with an improved efficiency of use of the material, thereby forming a large-area uniform thin film. The evaporator includes a rectangular post-shaped crucible with an open top face; and a nozzle having a body portion having a rectangular post-like shape with a height smaller than that of the crucible and assembled to an upper portion of the crucible, and a plurality of evaporation tubes penetrating through the body portion between top and bottom faces of the body portion. The evaporation tubes are divided into four groups of which evaporation tubes are inclined toward respective four corners of a top face of the nozzle unit. An evaporated material spouts toward peripheral areas of a substrate due to the inclined evaporation tubes, thereby improving the uniformity of a thin film to be deposited and the efficiency of use of the evaporated material, and preventing condensation of the evaporated material at a spouting portion.
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Choi Myung-Woon
Jeong Kwang-Ho
Kim Seong-Moon
Park Hyung-Won
Chen Keath T
Greenblum & Bernstein P.L.C.
Yas Co., Ltd.
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