Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1989-08-17
1991-04-23
Beck, Shrive
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
350320, 427 8, 427 9, 427 10, 427162, 427163, 427164, 427165, 427166, 427167, 4274193, 4274194, 4274196, 4272552, 4272553, G02B 2700, B05D 512, C23C 1454
Patent
active
050094858
ABSTRACT:
An error-compensated process for forming a multiple-notch optical filter which is characterized by a continually and accurately varying periodic profile. The optical medium if formed on a substrate so that the profile of the refractive index is multiply sinusoidally modulated to maintain Bragg's law for each component in the multiple-notch profile. In a preferred embodiment, as the optical medium is coated on the substrate, the depositing film is monitored by optical techniques, and feedback information is provided to a computer driven by a pre-programmed process control algorithm so that real time control of the manufacturing process may be accomplished.
REFERENCES:
patent: 4332833 (1982-06-01), Aspnes et al.
patent: 4469713 (1984-09-01), Schwiecker et al.
patent: 4545646 (1985-10-01), Chern et al.
patent: 4582431 (1986-04-01), Cole
patent: 4676646 (1987-06-01), Strand et al.
patent: 4837044 (1989-06-01), Murarka et al.
patent: 4915476 (1990-04-01), Hall et al.
Beck Shrive
Bueker Margaret
Denson-Low W. K.
Hughes Aircraft Company
Lachman M. E.
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