Optical: systems and elements – Lens – With reflecting element
Patent
1993-11-03
1996-05-07
Sugarman, Scott J.
Optical: systems and elements
Lens
With reflecting element
G02B 1708
Patent
active
055152074
ABSTRACT:
A reduction projection system (10) characterized by large numerical aperture has an unobscured optical path without the need to resort to truncated lens elements. The system includes first and second reduction stages. The first reduction stage includes a first mirror group (20) and a first lens group (30). The second reduction stage includes a second mirror group (40) and a second lens group (50). Together, the first mirror group and the first lens group form an intermediate reduced image of the object at an intermediate image region (70). The second mirror group and the second lens group form a further reduced image at an image plane (15).
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Nikon Precision Inc.
Sugarman Scott J.
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