Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2007-01-09
2007-01-09
Williams, Hezron (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C438S106000, C438S108000
Reexamination Certificate
active
11031029
ABSTRACT:
Methods and apparatus are provided forming a plurality of semiconductor devices on a single substrate, and sealing two or more of the devices at different pressures. First and second semiconductor devices, each having a cavity formed therein, are formed on the same substrate. The cavity in the first device is sealed at a first pressure, and the cavity in the second device is sealed at a second pressure.
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Bellamy Tamiko
Freescale Semiconductor Inc.
Ingrassia Fisher & Lorenz
Williams Hezron
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