Multiple local probe measuring device and method

Details Multiple local probe measuring device and method Multiple local probe measuring device and method

2007-12-25

2007-12-25

Tang, Minh N. (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S750010, C324S762010

Reexamination Certificate

active

11487428

ABSTRACT:
A local probe measuring device is provided for effecting local measurements of a sample. This device includes first and second local probes for local measurements with respect to a sample or a reference surface. A measurement condition adjustment arrangement is adapted to commonly adjust first and second measurement conditions of the respective first and second local probes with respect to the sample or the reference surface. A detection arrangement is provided that includes a first detection arrangement associated with the first local probe adapted to independently detect first measurement data referring to local measurements reflected by first local probe and a second detection arrangement associated with the second local probe adapted to independently detect second measurement data referring to local measurements effected by second local probe. Further, methods for effecting local measurements and local manipulations using multiple local probes are provided.

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