Multiple local probe measuring device and method

Details Multiple local probe measuring device and method Multiple local probe measuring device and method

2005-09-13

2005-09-13

Tang, Minh N. (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S762010, C324S750010

Reexamination Certificate

active

06943574

ABSTRACT:
The invention provides a local probe measuring device for effecting local measurements referring to a sample, having a first local probe for local measurements with respect to a sample, a second local probe for local measurements with respect to the sample, a measurement condition adjustment arrangement adapted to commonly adjust a first measurement condition of the first local probe with respect to the sample and a second measurement condition of the second local probe with respect to the sample, a detection arrangement having a first detection arrangement associated with the first local probe adapted to independently detect first measurement data referring to local measurements reflected by the first local probe and a second detection arrangement associated with the second local probe adapted to independently detect second measurement data referring to local measurements effected by the second local probe. Further, methods for effecting local measurements and local manipulations using multiple local probes are provided.

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