Fishing – trapping – and vermin destroying
Patent
1994-12-30
1996-02-06
Breneman, R. Bruce
Fishing, trapping, and vermin destroying
H01L 2144, H01L 21443
Patent
active
054895529
ABSTRACT:
Tungsten plugs are formed in a manner which avoids the formation of unwanted tungsten volcanoes by depositing at least three and preferably five to seven layers of tungsten within a contact hole to form a layered plug. In particularly useful embodiments, the layers are deposited at alternating fast and slow rates of deposition.
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Merchant Sailesh M.
Nanda Arun K.
Roy Pradip K.
AT&T Corp.
Breneman R. Bruce
Whipple Matthew
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