Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1995-01-17
1998-02-03
Keenan, James W.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414416, 414940, B65G 4907
Patent
active
057137110
ABSTRACT:
The present invention is an improved container and interface for transporting or otherwise handling contamination-sensitive materials, such as semi-conductor wafers during processing. The container of the present invention employs a door-within-a-door design, allowing the container to connect with different interfaces on a single side. Employing a container of the present invention, manufacturers may connect a single container to different tools or mini-environments employing incompatible interfaces without the need to use different containers or to access the contents of a single container from different directions. The present invention is particularly useful in instances where a single interface standard, e.g., SEMI Standard SMIF interfaces, has not been uniformly adopted in a facility. The present invention also provides means which allow either a cassette container or a cassette to be directly placed on an indexer and subsequent indexing to the correct location This is also useful in instances where a facility has not uniformly adopted SMIF technology, and requires the flexibility to load both cassettes and SMIF containers on the same tool.
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Briner Donald R.
Laramore Christopher D.
McKenna Douglas B.
Bye/Oasis
Keenan James W.
LandOfFree
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