Multiple hinge MEMS device

Details Multiple hinge MEMS device Multiple hinge MEMS device

2005-09-27

2005-09-27

Ben, Loha (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S214100, C359S224200, C359S298000, C359S850000, C257S417000, C310S036000, C310S090000, C310S309000

Reexamination Certificate

active

06950223

ABSTRACT:
A MEMS device is disclosed comprising: a substrate; a movable micromechanical element movable relative to the substrate; a connector and a hinge for allowing movement of the micromechanical element, wherein the connector is made of a material different than the hinge. In another embodiment of the invention, the connector has a conductivity greater than the hinge. In a further embodiment of the invention, the hinge provides at least 90% of the restoring force to the MEMS device, and the connector provides 10% or less of the restoring force. In a further embodiment of the invention, the connector and the hinge have different spring constants. In a still further embodiment of the invention, the connector experiences a lower strain at maximum deflection of the micromechanical element than the hinge.

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