Multiple function thin-film resistor-capacitor array

Details Multiple function thin-film resistor-capacitor array Multiple function thin-film resistor-capacitor array

2006-11-06

2009-12-01

Fourson, George (Department: 2823)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C438S048000, C438S066000, C438S098000, C257SE21351

Reexamination Certificate

active

07625775

ABSTRACT:
A multiple function thin-film resistor-capacitor array is used for an optical fiber receiving module. A dielectric thin film with desired pattern and thickness is form on surface of a silicon substrate by semiconductor manufacture process. Resistors of different resistances and capacitors of different capacitances or the combination thereof, and circuit connection therebetween can be provided by controlling the thickness and shape of thin film. The thickness of the thin-film resistor-capacitor array is adjusted by grinding to provide a substrate of a photodiode. The photodiode can be die bonded to the resistor-capacitor array with desired optical position.

REFERENCES:
patent: 2004/0188793 (2004-09-01), Lindemann et al.

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