Multiple frequency atomic force microscopy

Details Multiple frequency atomic force microscopy Multiple frequency atomic force microscopy

2006-10-05

2009-10-20

Larkin, Daniel S (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

07603891

ABSTRACT:
An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.

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Abraham, David W. et al. “Lateral dopant profiling in semiconductors by force microscopy using capacitive detection” J. Vac. Sci. Technol B 9(2) mar/Apr 1991, 703-706.

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