Multiple filtration bypass method and apparatus for reducing par

Details Multiple filtration bypass method and apparatus for reducing par Multiple filtration bypass method and apparatus for reducing par

1997-07-14

2000-01-18

Popovics, Robert J.

Liquid purification or separation

Serially connected distinct treating with or without storage...

210900, B01D 3500

Patent

active

060154934

ABSTRACT:
A remote filtration unit for liquid distribution systems (LDS) used for delivering ultra-pure liquids for semiconductor manufacturing processes is provided. The filtration unit includes a plurality of filtration systems enclosed in separate compartments, wherein each compartment is served by an input and an output lead line. Using quick connect/disconnect fittings, the liquid distribution system (LDS) channel is tapped at desired locations and bypass loops are inserted in the channel. A bypass loop includes an input lead line, an associated filtration unit compartment including a filtration system, and an output lead line. Using bypass loops, LDS liquid is routed into the remote filtration system, cleaned, and then channeled back into the liquid distribution system or target product or process area.

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